| 不同压力下碳氢体系低压金刚石的非平衡定态系列相图 |
| SERIES OF NON-EQUILIBRIUM STATIONARY PHASE DIAGRAMS ON DIAMOND GROWTH UNDER DIFFERENT PRESSURES OF C-H SYSTEM |
|
| 摘要: 系统压力是低压金刚石薄膜生长实验中重要的实验参数，如果采用合理的计算方法定量化地预测出压力对金刚石薄膜生长条件的影响，则可以直接用于指导其实验研究。本文报道根据非平衡热力学耦合理论模型绘制了C-H体系金刚石生长投影相图，经与大量实验结果比较相一致，并系统地计算了压力变化的碳氢体系金刚石生长非平衡定态截面相图，得到了金刚石生长区随压力变化的规律。计算得到的相图与经典平衡相图有本质不同，均有金刚石生长区，因而可以合理解决金刚石低压下连续生长而石墨被腐蚀与经典平衡热力学之间的矛盾。本文的计算结果可以为金刚石生长实验提供定量化的压力条件的选择和优化实验条件。 |
| 关键词: 非平衡定态 金刚石 相图 C-H体系 |
| 基金项目: |
| Abstract: System pressures are important experimental coefficients in the deposition process of thin diamond films. If proper calculation method is chosen to predict diamond growth condition quantitatively, such mehtod can guide the experimental research on the subject. Based on non-equilibrium thermodynamic coupling model, stationary project phase diagrams on diamond growth were calculated and coordinated well with quantities of experimental results that had been published. Also, phase diagrams under different pressures for C-H system were systematically drawn in this paper and the principles of the variation of diamond growth region with different pressures were obtained. The phase diagrams all have diamond domain, which is very different from the diagrams based on classical equilibrium thermodynamics. In this way, the non-equilibrium coupling model settled the controdiction between the classical equilibrium thermodynamics and the experimental fact that the diamond can grow successively and graphite can be etched under low pressure. The calculated results can give quantitatively favorable guide to experimental research on diamond growth. |
| Keywords: non-equilibrium stationary state diamond phase diagram C-Η system |
| |
| 摘要点击次数: 1373 |
| 全文下载次数: 1158 |
| 刘志杰,张卫,万永中,王季陶.不同压力下碳氢体系低压金刚石的非平衡定态系列相图[J].无机化学学报,1998,14(4):412-417. |
| 查看全文 查看/发表评论 下载PDF阅读器 |
| Support information: |
|
|
|
|
|
|
