| 激光CVD法合成SiC-Si3N4复合纳米颗粒 |
| Synthesis of SiC-Si3N4 Composite Nanoparticles by Laser-Induced Chemical Deposition |
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| 摘要: 用激光化学蒸汽沉积(CVD)法合成了SiC-Si3N4复合纳米颗粒,并用X射线衍射(XRD),透射电子显微镜(TEM)和电子自旋共振磁力计(ESR)分析了试料的晶体结构,颗粒形状以及悬空键的状况。合成的试料粒度分布集中,平均粒径为32nm,颗粒由直径为5～30nm的单晶或多晶组成。试料纯度高,颗粒为近似球形,十分适合于粉体的加工和烧结。另外试料有很高的热稳定性,在加热的过程中的变化首先是悬空键减少,然后是相分解和颗粒长大。 |
| 关键词: SiC Si3N4 纳米颗粒 晶体结构 粒度分布 悬空键 热稳定性 |
| 基金项目: |
| Abstract: SiC-Si3N4 composite nanoparticles were synthesized by laser-induced chemical vapor deposition. The crys-talline structure, morphology and dangling bonds were investigated by X-ray diffraction(XRD), transmission electron microscopy (TEM) and electron spin resonance (ESR). The original SiC-Si3N4 composite nanoparticles have a sharp particle size distribution and the mean particle diameter is 32nm. A SiC-Si3N4 composite nanoparticle is composed of a single crystal or multicrystal with sizes from 5 to 30nm. The nanoparticles have high purity, are approximately spherical in shape and suitable for treatment and sintering. Moreover, the nanoparticles show high thermal stability, and decrease in the dangling bonds, phase deposition and particle growth take place in order during heating. |
| Keywords: SiC Si3N4 nanoparticles crystalline structure particle size distribution dangling bond thermal stability |
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| 李星国.激光CVD法合成SiC-Si3N4复合纳米颗粒[J].无机化学学报,2002,18(1):91-94. |
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