纳米孔阵列阳极氧化铝膜的制备和表征(英文)
Preparation and Characterization of Anodic Aluminum Oxide Films with Nanopore Arrays
作者单位
杨文彬 四川大学材料科学与工程学院成都 610064 
朱世富 四川大学材料科学与工程学院成都 610064 
赵北君 四川大学材料科学与工程学院成都 610064 
叶军 四川大学材料科学与工程学院成都 610064 
倪经 四川大学材料科学与工程学院成都 610064 
甄万宝 四川大学材料科学与工程学院成都 610064 
陈兴明 四川大学材料科学与工程学院成都 610064 
摘要: 本文通过在0℃、0.5mol·L-1的草酸溶液中阳极氧化高纯铝片的方法制得了阳极氧化铝(AAO)膜,并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对AAO膜的形貌和结构进行了表征。结果表明,阻挡层AAO膜中大小一致的膜胞在铝/氧化铝界面上排成六方形阵列;有孔层AAO膜中含有高度有序的纳米孔阵列和膜胞阵列,并且孔的直径和膜胞的尺寸都具有较窄的分布。另外,考察了阳极氧化电压对膜胞尺寸、孔径大小、孔密度和膜胞密度的影响,表明在一定的电压范围内,膜胞和孔径都随电压的升高而增大,而孔密度和膜胞密度却随电压的升高而减小。
关键词: 纳米孔阵列 阳极氧化铝 制备 扫描电子显微镜 原子力显微镜
基金项目: 
Abstract: A one-step preparation technology for the anodic aluminum oxide (AAO) films with nearly ideal nanopore arrays can be fabricated by anodizing highly pure aluminum foils in 0.5mol·L-1 H2C2O4 solution at 0℃ for 48h under different voltages is reported. The morphologies and structures of the obtained AAO films were characterized by scanning electron microscope (SEM) and atom force microscope (AFM). AFM image of barrier AAO at alu-minum/alumina interface was firstly observed. Results show that cells in barrier AAO are arranged in hexagonal arrays at aluminum/alumina interface. SEM and AFM analyses on porous AAO films show that cells in porous AAO films appear as columnar hexagons and each contains a pore in the center, so cells and pores in porous AAO films are also arranged in hexagonal arrays; and sizes of the cells and diameters of the pores which are on the scale of nanometer have narrow distribution. Furthermore, the mechanism on arrangement of cells and pores, the effect of experimental conditions on quality of the obtained AAO films were discussed. Results indicate that sizes of cells and diameters of pores in porous AAO films increase with the height of anodizing voltage, while densities of pores and densities of cells decrease with the height of anodizing voltage.
Keywords: nanopore array anodic aluminum oxide (AAO) preparation scanning electron microscope (SEM) atom force microscope (AFM)
 
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杨文彬,朱世富,赵北君,叶军,倪经,甄万宝,陈兴明.纳米孔阵列阳极氧化铝膜的制备和表征(英文)[J].无机化学学报,2003,19(4):366-370.
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