| 三正丁基膦稳定的铜(Ⅰ)β-二酮配合物的合成、表征以及作为前驱物用化学汽相沉积法生长铜膜(英) |
| Synthesis of Tri-n-butylphosphine Copper(Ⅰ) β-Diketonates and Their Use in Chemical Vapour Deposition of Copper |
| 作者 | 单位 | | 沈应中 | Technische Universit?t Chemnitz, Fakult?t für Naturwissenschaften, Institut für Chemie, Lehrstuhl Anorganische Chemie, StraBe der Nationen 62, 09111 Chemnitz, Germany | | Marion Leschke | Technische Universit?t Chemnitz, Fakult?t für Naturwissenschaften, Institut für Chemie, Lehrstuhl Anorganische Chemie, StraBe der Nationen 62, 09111 Chemnitz, Germany | | Stefan E. Schulz | Technische Universit?t Chemnitz, Fakult?t für Elektrotechnik und Informationstechnik, Zentrum für Mikrotechnologien, Reichenhainer StraBe 70, 09126 Chemnitz, Germany | | Ramona Ecke | Technische Universit?t Chemnitz, Fakult?t für Elektrotechnik und Informationstechnik, Zentrum für Mikrotechnologien, Reichenhainer StraBe 70, 09126 Chemnitz, Germany | | Thomas Gessner | Technische Universit?t Chemnitz, Fakult?t für Elektrotechnik und Informationstechnik, Zentrum für Mikrotechnologien, Reichenhainer StraBe 70, 09126 Chemnitz, Germany | | Heinrich Lang | Technische Universit?t Chemnitz, Fakult?t für Naturwissenschaften, Institut für Chemie, Lehrstuhl Anorganische Chemie, StraBe der Nationen 62, 09111 Chemnitz, Germany |
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| 摘要: 合成了一系列三正丁基膦辅助配体稳定的铜(Ⅰ)β-二酮配合物，对合成的配合物用元素分析、红外、核磁共振以及热重和差热等手段进行了表征。筛选出性能优良的配合物为前驱物用化学汽相沉积(CVD)的方法生长出金属铜膜，用SEM和EDX等手段对生长的铜膜进行了表征。 |
| 关键词: 一价铜 β-二酮 三正丁基膦 化学汽相沉积 热分析 扫描电镜 X-射线能量散射 |
| 基金项目: |
| Abstract: A series of copper(Ⅰ) β-diketonate complexes of type [(nBu3P)mCuL] [m=1 or 2. m=1: L=acac (4), acac=acetylacetonate; L=dbac (5), dbac=1,3-di-tert-butylacetonate; L=hfac (6), hfac=1, 1, 1, 5, 5, 5-hexafluoroacetylacetonate; m=2: L=acac (7); L=dbac (8); L=hfac (9)] with nBu3P as ancillary Lewis-base ligand is accessible by the reaction of [(nBu3P)mCuCl] (1: m=1, 2: m=2) with the sodium-β-diketonate salts NaL (3a: L=acac; 3b: L=dbac; 3c: L=hfac) in a 1∶1 molar ratio. Complexes 7～9 can also be prepared by treatment of 4～6 with one equivalent of nBu3P (10). Spectroscopic data (IR, 1H-, 13C{1H}-NMR) of 4～9 reveal that the respective β-diketonates are chelate-bound to copper(Ⅰ), thus resulting in a tri- (4～6) or tetra-coordination (7～9) at the transition metal ion. The thermal properties of 4～9 were studied by ThermoGravimetric analysis (TG) and Differential Scanning Calorometry (DSC). Hot-wall Chemical Vapour Deposition experiments (CVD) were carried-out by using, for example, complexes 4 and 7 as precursors for the deposition of copper onto TiN-coated SiO2 wafers. SEM and EDX studies were applied to characterize the obtained copper films. |
| Keywords: copper(Ⅰ) β-diketonate tri-n-butylphosphine chemical vapour deposition SEM EDX TG DSC |
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| 全文下载次数: 1920 |
| 沈应中,Marion Leschke,Stefan E. Schulz,Ramona Ecke,Thomas Gessner,Heinrich Lang.三正丁基膦稳定的铜(Ⅰ)β-二酮配合物的合成、表征以及作为前驱物用化学汽相沉积法生长铜膜(英)[J].无机化学学报,2004,20(11):1257-1264. |
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