| OTS自组装单层膜诱导生长Sb2S3薄膜及其生长机理 |
| Growth of Sb2S3 Thin Films Directed by OTS Self-assembled Monolayer and Its Formation Mechanism |
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| 摘要: 在接近室温的水溶液中通过采用OTS-自组装单分子层制备了Sb2S3薄膜。利用X-射线粉末衍射(XRD)、扫描电子显微镜(SEM)、X-射线能量色散谱(EDS)和紫外-可见分光光度计(UV-Vis)对Sb2S3 薄膜的结构、形貌和光学性能进行了表征。结果表明，低温下所制备的薄膜为非晶态结构，当薄膜在空气中200~300 ℃热处理1h时，非晶态薄膜转化成具有正交晶相结构的多晶结构。光学性能测试表明，沉积的Sb2S3 薄膜和在空气中200 ℃热处理1 h后Sb2S3薄膜的能带值分别为2.05和1.78 eV。功能化OTS自组装单分子层(SAMs)在Sb2S3薄膜的生长过程中起到了诱导生长的作用。通过实验结果，进一步分析了Sb2S3薄膜的形成机理。 |
| 关键词: 自组装单分子层 光学性能 半导体 微观结构 |
| 基金项目: |
| Abstract: Self-assembled monolayers (SAMs) of octadecyl-trichloro-silane (OTS) were used to induce the nucleation and growth of antimony sulphide (Sb2S3) thin films from aqueous solution at a near room temperature. The structure, morphology, and optical properties of the as-synthesized Sb2S3 thin films were investigated using X-ray diffraction, scanning electron microscopy, X-ray energy-dispersive spectroscopy, and UV-Vis spectrometer. The result shows that the as-deposited film is amorphous structure. By heating up to 200~300 ℃ for 1 h in air, the deposited films were transformed into polycrystalline with orthorhombic structure. The values of optical band energy were evaluated as 2.05 eV and 1.78 eV for the as-deposited and annealed Sb2S3 films at 200 ℃ for 1 h in air, respectively. It was found that the OTS-functionalized SAMs films play an active role for controlling nucleation and growth of Sb2S3 thin films at low temperature. The formation mechanism of Sb2S3 thin films was proposed according to the experiment results. |
| Keywords: self-assembled monolayers optical property semiconductor microstructure |
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| 朱刚强,黄锡金,冯 波,葛 宝,边小兵.OTS自组装单层膜诱导生长Sb2S3薄膜及其生长机理[J].无机化学学报,2010,26(11):2041-2046. |
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