| 核壳结构PS/CeO2复合微球的制备及其在化学机械抛光中的应用 |
| Preparation of Composite Polystyrene-Core CeO2-Shell Microspheres and Their Application in the Oxide Chemical Mechanical Polishing |
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| 摘要: 以原位化学沉淀的方法制备了不同粒径、包覆结构PS(核)/CeO2(壳)复合微球，利用X射线衍射仪、透射电子显微镜、选区电子衍射、场发射扫描电子显微镜、能谱分析仪、Fourier转换红外光谱仪、热失重分析仪和ζ电位测定仪等手段对所制备样品的微观结构进行了表征。将所制备的复合微球用做磨料，考察其对二氧化硅介质层的抛光性能，用原子力显微镜观察和测量抛光表面的微观形貌、轮廓曲线和粗糙度。结果表明，所制备的PS/CeO2复合微球具有核壳包覆结构，粒径分别约为140，180和220 nm，PS内核被粒径约为5 nm的CeO2颗粒均匀包覆。AFM结果显示，复合磨料的粒径越小，抛光后表面粗糙度越低；且酸性(pH=3)比碱性(pH=10)抛光浆料具有更好的抛光效果。 |
| 关键词: PS/CeO2复合微球 核壳结构 磨料 化学机械抛光 |
| 基金项目: |
| Abstract: Composite polystyrene-core CeO2-shell (PS/CeO2) microspheres with different particle size had been synthesized by in-situ chemical precipitation technique. The as-synthesized PS/CeO2 composite microspheres samples were characterized by techniques of X-ray diffraction(XRD), transmission electron microscope (TEM), selected area electron diffraction patterns (SAED), field emission scanning electron microscope (FESEM), electron energy dispersive spectroscope(EDS)、fourier transform infrared spectrum (FTIR), thermogravimetric analysis(TGA) and ζ potential analyzer. Effects of particle size and slurrys pH value on the oxide chemical mechanical polishing performance of PS/CeO2 composite abrasives were characterized by atomic force microscope (AFM). The results indicated that PS/CeO2 composite abrasives with core-shell morphology are obtained successfully, and the particle size of as-prepared PS/CeO2 composite microspheres is about 140, 180 and 220 nm, respectively, and the PS microsphere is uniformly coated by CeO2 nanoparticle (particle size of ~5 nm). After CMP, the surface roughness of SiO2 dielectric layer is decreased in particle size of composite abrasives, and the polishing performance using acid slurry (pH=3) is better than that of alkaline slurry (pH=10). |
| Keywords: PS/CeO2 composite microspheres core-shell morphology abrasives chemical mechanical polishing |
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| 陈 杨,陆锦霞,陈志刚.核壳结构PS/CeO2复合微球的制备及其在化学机械抛光中的应用[J].无机化学学报,2011,27(1):66-72. |
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